PVD systems

INLINECOATER™ – compact, modular, and automation-ready PVD systems

The INLINECOATER™ PVD system family is based on modular, high-capacity, high-vacuum coating platforms, featuring compact factory footprints, and short cycle times down to tens of seconds. The systems are available in three sizes: INLINECOATER™ IC2000, IC500+, and IC500.

Automation and integration with standard robot interfaces are available on all three models. Automation makes the INLINECOATER™ ideal for factory integration and for multi-unit scaling of production capacity in high-volume scenarios.

Compact format with excellent production capacity

The compact INLINECOATER™ system design, with loadlock unloading and loading and three separated process chambers, provides a high continuous throughput of small coating batches. Few moving parts, process chambers that are not exposed to atmosphere, and easy maintenance, allow exceptional quality control and production uptimes in all volume scenarios.

General technical specifications

Key equipment benefits

• Compact design for a small workspace footprint
• Easy to automate and integrate for volume production
• Three process chambers for optimal flexibility
• Designed for simultaneous double-sided coating processes
• High, continuous throughput of small batches enables excellent quality control
• Quick Plug and Play installation

INLINECOATER™ IC2000

The INLINECOATER™ IC2000 is the largest system of the product line and the hydrogen industry’s choice of model. With high throughput, availability of double-sided coatings, large chamber area, and attractive price, the INLINECOATER™ IC2000 is an ideal coating system for larger format substrates and high-volume production scenarios. Thanks to the compact design with small batches and high continuous throughput, the model can also be utilized for prototyping and small batch coatings with attractive scalability of volumes over time.

With chamber measurements 650 x 550 mm and robot ready interface for volume production the INLINECOATER™ IC2000 model is an ideal choice for production of advanced fuel cell and electrolyzer coatings.

Model	Chamber size (L x W)*	Carousel height options	Footprint (L x W x H)	Weight **	Dry cycle time
INLINECOATER IC2000	650 x 550 mm	50 mm	6.2 x 2.2 x 2.4 m	4500 – 5000 kg	Down to 26 s

INLINECOATER™ IC500

The INLINECOATER™ IC500 is a general-purpose PVD system – equally suited for R&D, scale-up and manufacturing scenarios. It is used worldwide for metallization and decorative applications, as well as small to medium volume production of fuel cell plates. Chamber measurements 515 x 315 mm make the model suitable for mid-sized to small substrates.

This model can be equipped with different height adaptor kits, to enable versatility of substrate heights for transfer between coating chambers. This is of particular importance to obtain optimal control of chamber volume and process times for different applications and end-products.

Model	Chamber size (L x W)*	Carousel height options	Footprint (L x W x H)	Weight **	Dry cycle time
INLINECOATER IC500	515 x 315 mm	50 mm 100 mm 150 mm	4.7 x 1.6 x 2.3 m	3000 – 3500 kg	Down to 26 s

INLINECOATER™ IC500+

The INLINECOATER™ IC500+ is used as a streamlined production unit for metallization, and for small to medium volume production of fuel cell plates. Chamber measurements 450 x 410 mm make the model suitable for mid-sized to small substrates.

This model can be equipped with different height adaptor kits, to enable versatility of substrate heights. This is of particular importance to obtain optimal control of chamber volume and process times for different applications and end-products.

Model	Chamber size (L x W)*	Carousel height options	Footprint (L x W x H)	Weight **	Dry cycle time
INLINECOATER IC500+	450 x 410 mm	50 mm 100 mm 150 mm	4.8 x 1.7 x 2.3 m	3000 – 3500 kg	Down to 26 s